For immediate release: September 12, 2003
For more information, contact Jeff Bendix at 216-368-6070 or jeff.bendix@case.edu

CLEVELAND—Case Western Reserve University has completed an agreement with FLX Micro, Inc. of Solon, Ohio to license advanced technology that will greatly improve the performance of microelectricalmechanical systems (MEMS) across a wide range of industries.

The technology licensed from the University relates to advanced methods of fabricating polycrystalline silicon carbide thin films for use in MEMS-based devices. Silicon carbide is well known for its outstanding mechanical, chemical and thermal properties, and can bring substantial performance benefits to MEMS-based devices.

The principal investigators in developing the technology were Mehran Mehregany, professor and director of the Department of Electrical Engineering and Computer Science in the Case School of Engineering, and Christian Zorman, principal researcher in the department. The University received an undisclosed equity interest in FLX Micro as part of the licensing agreement.

"We are pleased to add this new technology to our portfolio," said Jeff Melzak, president of FLX Micro. "Case's expertise in silicon carbide and MEMS fits nicely with our goal of offering a unique value proposition to our customers. We have enjoyed a positive working relationship with Case for a number of years and are delighted to formalize our relationship in this manner."

Casey Porto, the University's associate vice president for technology transfer noted, "This agreement with FLX Micro represents another example of our continued commitment to work with companies in Northeast Ohio so that the results of research conducted at Case will benefit Northeast Ohio."

"The team at the Technology Transfer Office worked with us to reach an agreement that was truly win-win," said Tim Biro, chairman of FLX Micro and managing partner of the Ohio Innovation Fund, one of the company's investors. "They were highly professional and engaging at every stage of the process. The experience and commitment of the Case team enabled us to quickly get to the core issues for our business, reach agreement, and bring this exciting new technology into FLX Micro."

Nick Frollini, director of technology transfer for engineering and physical sciences and managing director of the Case Technology Ventures fund, added, "FLX Micro is poised to assume a leadership role in the growing microsystems market. We hope that they will become a significant force in our region."

FLX Micro offers an advanced microsystems toolkit, including MEMS-based product development, state-of-the-art process technologies for silicon carbide, and low cost MEMS prototyping through MUSiC, the world's first and only multi-user micromachining process that utilizes silicon carbide structural layers.

–Case–

 

Legal Information | © 2003 Case Western Reserve University | Contact the Department